中国科学院广州能源研究所机构知识库

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Creator：Ai, B分Ai, B    Creator：Ai, B    First author    Creator：Chen, Z    Community：中国科学院广州能源研究所    First author affiliation    The first author    Corresponding Author

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Electrical properties of B-doped polycrystalline silicon thin films prepared by rapid thermal chemical vapour deposition 期刊论文 THIN SOLID FILMS, 2006, 卷号: 497, 期号: 1-2, 页码: 157-162 Authors:  Ai, B;  Shen, H;  Liang, ZC;  Chen, Z;  Kong, GL;  Liao, XB Favorite  |  View/Download：85/0  |  Submit date：2016/10/27 Chemical Vapour Deposition  Electrical Properties And Measurements  Scanning Electron Microscopy  Polycrystalline Silicon