GIEC OpenIR
Enhanced thermal stability and thermochromic properties of VOx-based thin films by room-temperature magnetron sputtering
Zhan, Yongjun1,2,3,4; Xiao, Xiudi1,2,3; Lu, Yuan1,2,3,4; Cao, Ziyi1,2,3,5; Qi, Shuai1,2,3,5; Huan, Changmeng1,2,3,5; Cheng, Haoliang1,2,3; Shi, Jifu1,2,3; Xu, Gang1,2,3,6
2018
发表期刊SOLAR ENERGY MATERIALS AND SOLAR CELLS
ISSN0927-0248
卷号174页码:102-111
摘要In order to enhance the thermal stability and thermochromic properties, three kinds of VOx-based thin films with different structures (single-layer, triple-layer and multi-layer, respectively) were designed in this study. All of them were prepared by room-temperature reactive magnetron sputtering and subsequently rapid thermal annealing (RTA) in nitrogen atmosphere. The optical properties and microstructure of VOx-based thin films were investigated. The results reveal that all samples are ascribed to pure VO2 (M), and the VOx-based thin films exhibit superior thermochromic properties with the solar modulation (Delta T-sol) up to 12.75%, 15.65% and 18.02%, respectively. The phase transition temperature (T-c) is as low as 54 degrees C for multi-layer thin films without doping, which indicates that the film design could effectively enhance optical switching and depress the T. After thermal treatment in the air, the phase of V2O5 appeared at 325 degrees C, 275 degrees C and 375 degrees C for single-layer, triple-layer and multi-layer thin films, respectively, which indicates the multi-layer thin films show the best thermal stability. According to the degradation mechanism in this paper, the unbalance of interfacial stress and oxygen vacancies in VOx thin film accelerated the oxidation process, which results in the disappearance of thermochromic properties. Furthermore, the multi-layer thin films still show superior Delta T-Sol of 16.56% and T-c of 56 degrees C, when it was taken out at 400 degrees C and cooled quickly in air. Meanwhile, the annealing period could be reduced by 75% in comparison to cooling in vacuum chamber. Our research set forth a new avenue in enhancing the thermal stability and production efficiency, which can promote the practical applications of VOx-based thin films.
文章类型Article
关键词Vox-rbased Thin Films Reactive Sputtering Rapid Thermal Annealing Thermaochromic Performance Thermal Stability
WOS标题词Science & Technology ; Technology ; Physical Sciences
资助者Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011)
DOI10.1016/j.solmat.2017.08.030
研究领域[WOS]Energy & Fuels ; Materials Science ; Physics
关键词[WOS]INSULATOR-TRANSITION ; MULTILAYER FILMS ; RELAXATION
收录类别SCI
语种英语
资助者Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Major Science and Technology Projects of Guangdong Province(2014A010106018 ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Youth Innovation Promotion Association CAS(2017400) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Special Plan of Guangdong Province(2015TQ01N714) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Energy Saving Special Funds of Tianhe district, Guangzhou city(Y509tj1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Guangdong Key Laboratory of New and Renewable Energy Research and Development(Y609je1001) ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Patent Technology Implementation Project of Guangdong Province ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Project of Science and Technology Service Network Initiative(KFJ-STS-QYZD-010) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; Major Science and Technology Project of Tibet Autonomous Region(ZD20170017) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011) ; 2013A011401011)
WOS类目Energy & Fuels ; Materials Science, Multidisciplinary ; Physics, Applied
WOS记录号WOS:000415392500013
出版者ELSEVIER SCIENCE BV
引用统计
被引频次:5[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.giec.ac.cn/handle/344007/16493
专题中国科学院广州能源研究所
通讯作者Xiao, Xiudi; Xu, Gang
作者单位1.Chinese Acad Sci, Guangzhou Inst Energy Convers, Guangzhou 510640, Guangdong, Peoples R China
2.CAS Key Lab Renewable Energy, Guangzhou 510640, Guangdong, Peoples R China
3.Guangdong Prov Key Lab New & Renewable Energy Res, Guangzhou 510640, Guangdong, Peoples R China
4.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
5.Univ Sci & Technol China, Nano Sci & Technol Inst, Suzhou 215123, Peoples R China
6.Tibet New Energy Res & Demonstrat Ctr, Lhasa 850000, Tibet, Peoples R China
第一作者单位中国科学院广州能源研究所
通讯作者单位中国科学院广州能源研究所
推荐引用方式
GB/T 7714
Zhan, Yongjun,Xiao, Xiudi,Lu, Yuan,et al. Enhanced thermal stability and thermochromic properties of VOx-based thin films by room-temperature magnetron sputtering[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS,2018,174:102-111.
APA Zhan, Yongjun.,Xiao, Xiudi.,Lu, Yuan.,Cao, Ziyi.,Qi, Shuai.,...&Xu, Gang.(2018).Enhanced thermal stability and thermochromic properties of VOx-based thin films by room-temperature magnetron sputtering.SOLAR ENERGY MATERIALS AND SOLAR CELLS,174,102-111.
MLA Zhan, Yongjun,et al."Enhanced thermal stability and thermochromic properties of VOx-based thin films by room-temperature magnetron sputtering".SOLAR ENERGY MATERIALS AND SOLAR CELLS 174(2018):102-111.
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