限定条件 |
((收录类别:SCI) AND (出处:MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING) AND (作者:Chen, Xiaojuan分Chen, Xiaojuan) AND (作者:Chen, Jieming) AND (作者:Chen, Xiaojuan) AND (作者:Yao, Liang) AND (资助机构:Doctoral Fund of Ministry of Education of China) AND (资助机构:Natural Science Foundation of Guangdong Province of China) AND (资助项目:Doctoral Fund of Ministry of Education of China[2019M663139]) AND (资助项目:Doctoral Fund of Ministry of Education of China[2020M672854]) AND (资助项目:National Natural Science Foundation of China[51708116]) AND (资助项目:Natural Science Foundation of Guangdong Province of China[2020A1515010364]) AND (资助项目:Natural Science Foundation of Guangz-hou[202102020825]) AND (文献类型:期刊论文)) |