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((Source Publication:MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING) AND (Creator:Chen, Xiaojuan) AND (Creator:Lai, Yiqi) AND (Date Issued:2022) AND (Language:英语) AND (Funding Organization:Doctoral Fund of Ministry of Education of China) AND (Funding Organization:Natural Science Foundation of Guangdong Province of China) AND (Funding Project:Doctoral Fund of Ministry of Education of China[2020M672854]) AND (Funding Project:National Natural Science Foundation of China[51708116]) AND (Funding Project:Natural Science Foundation of Guangdong Province of China[2020A1515010364]) AND (Funding Project:Natural Science Foundation of Guangz-hou[202102020825]) AND (Document Type:期刊论文)) |