GIEC OpenIR  > 中国科学院广州能源研究所
王磊; 沈辉; 胡芸菲; 班群
Source Publication第八届全国光伏会议暨中日光伏论坛 ; 第八届全国光伏会议暨中日光伏论坛
Source Publication第八届全国光伏会议暨中日光伏论坛 ; 第八届全国光伏会议暨中日光伏论坛
Conference Date2004-11-15
Conference Place深圳
Publication Place深圳
Funding Organization中国太阳能学会
Other Abstract研究了RTCVD 设备参数如:温度、反应气体流量、沉积时间对多晶硅薄膜的性能的影响,通过扫描电镜(SEM)、X 射线(XRD)、霍尔测试及电池模拟软件PC1D 描述了薄膜性质随各参数的变化规律性,提出改进薄膜性能的思路。
Keyword多晶硅薄膜 太阳电池 薄膜性能
Document Type会议论文
Recommended Citation
GB/T 7714
王磊,沈辉,胡芸菲,等. RTCVD制备多晶硅薄膜的性能参数研究[C]. 深圳,2004.
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