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Uniform MEMS chip temperatures in the nucleate boiling heat transfer region by selecting suitable, medium boiling number range
Xu, J. L.1; Gan, Y. H.2
2007-07-01
Source PublicationNANOSCALE AND MICROSCALE THERMOPHYSICAL ENGINEERING
ISSN1556-7265
Volume11Issue:3-4Pages:273-300
Corresponding Authorxujl@ms.giec.ac.cn
AbstractThe not only lower but also uniform MEMS chip temperatures can he reached by selecting suitable boiling number range that ensures the nucleate boiling heat transfer. In this article, boiling heat transfer experiments in 10 silicon triangular microchannels with the hydraulic diameter of 55.4 mu m were performed using acetone as the working fluid, having the inlet liquid temperatures of 24-40 degrees C, mass fluxes of 96-360 kg/m(2)s, heat fluxes of 140-420 kW/m(2), and exit vapor mass qualities of 0.28-0.70. The above data range correspond to the boiling number from 1.574 x 10(-3) to 3.219 x 10(-3) and ensure the perfect nucleate boiling heat transfer region, providing a very uniform chip temperature distribution in both streamline and transverse directions. The boiling heat transfer coefficients determined by the infrared radiator image system were found to he dependent on the heat Axes only, not dependent on the mass Axes and the vapor mass qualities covering the above data range. The high-speed flow visualization shows that the periodic flow patterns take place inside the microchannel in the time scale of milliseconds, consisting of liquid refilling stage, bubble nucleation, growth and coalescence stage, and transient liquid film evaporation stage in a full cycle. The paired or triplet bubble nucleation sites can occur in the microchannel corners anywhere along the flow direction, accounting for the nucleate boiling heat transfer mode. The periodic boiling process is similar to a series of bubble nucleation, growth, and departure followed by the liquid refilling in a single cavity for the pool boiling situation. The chip temperature difference across the whole two-phase area is found to he small in a couple of degrees, providing a better thermal management scheme for the high heat flux electronic components. Chen's [11 widely accepted correlation for macrochannels and Bao et al.'s [21 correlation obtained in a copper capillary tube with the inside diameter of 1.95 mm using R11 and HCFC123 as working fluids can predict the present experimental data with accepted accuracy. Other correlations fail to predict the correct heat transfer coefficient trends. New heat transfer correlations are also recommended.
SubtypeArticle
KeywordMicrochannels Nucleate Boiling Heat Transfer Uniform Chip Temperature Flow Pattern
WOS HeadingsScience & Technology ; Physical Sciences ; Technology
DOI10.1080/15567260701715370
WOS Subject ExtendedThermodynamics ; Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
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WOS KeywordPRESSURE-DROP ; GENERAL CORRELATION ; FLOW ; CHANNELS ; TUBES ; REFRIGERANTS ; DEVICES ; ANNULI ; SINK ; FLUX
Indexed BySCI
Language英语
WOS SubjectThermodynamics ; Engineering, Mechanical ; Nanoscience & Nanotechnology ; Materials Science, Characterization & Testing ; Physics, Applied
WOS IDWOS:000252065300004
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Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.giec.ac.cn/handle/344007/3462
Collection中国科学院广州能源研究所
Affiliation1.Chinese Acad Sci, Guangzhou Inst Energy Convers, Micro Energy Syst Lab, Guangzhou 510640, Peoples R China
2.S China Univ Technol, Sch Elect Power, Guangzhou, Peoples R China
Recommended Citation
GB/T 7714
Xu, J. L.,Gan, Y. H.. Uniform MEMS chip temperatures in the nucleate boiling heat transfer region by selecting suitable, medium boiling number range[J]. NANOSCALE AND MICROSCALE THERMOPHYSICAL ENGINEERING,2007,11(3-4):273-300.
APA Xu, J. L.,&Gan, Y. H..(2007).Uniform MEMS chip temperatures in the nucleate boiling heat transfer region by selecting suitable, medium boiling number range.NANOSCALE AND MICROSCALE THERMOPHYSICAL ENGINEERING,11(3-4),273-300.
MLA Xu, J. L.,et al."Uniform MEMS chip temperatures in the nucleate boiling heat transfer region by selecting suitable, medium boiling number range".NANOSCALE AND MICROSCALE THERMOPHYSICAL ENGINEERING 11.3-4(2007):273-300.
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